Exhibit 21.1
KLA-Tencor Corporation
List of Subsidiaries
Name |
State or Other Jurisdiction of Incorporation |
|
DOMESTIC SUBSIDIARIES |
||
Phase Shift Technology, Inc. |
Arizona | |
Blue 29 Corporation |
California | |
International Sales & Business, Inc. |
California | |
KLA-Tencor Building Corporation |
California | |
KLA-Tencor China Corporation |
California | |
KLA-Tencor DISC Corporation |
California | |
KLA-Tencor International Corporation |
California | |
KLA-Tencor Instruments Klinnik Corporation |
California | |
KLA-Tencor Technologies Corporation |
California | |
SensArray Corporation |
California | |
Sensys Instruments Corporation |
California | |
Therma-Wave Domestic International Sales Corporation |
California | |
VLSI Standards, Inc. |
California | |
ADE International Corporation |
Delaware | |
FabSolve, LLC |
Delaware | |
KLA-Tencor Asia-Pac Distribution Corporation |
Delaware | |
OnWafer Technologies, Inc. |
Delaware | |
Therma-Wave, Inc. |
Delaware | |
ADE Corporation |
Massachusetts | |
ADE Optical Systems Corporation |
Massachusetts | |
ADE Securities Corp. |
Massachusetts | |
ADE Software Corporation |
Massachusetts | |
ADE Technologies, Inc. |
Massachusetts | |
INTERNATIONAL SUBSIDIARIES |
||
ATI Foreign Sales Corporation |
Barbados | |
Lee Ta Technologies (BVI), Inc. |
British Virgin Islands | |
KLA-Tencor Corporation (Cayman) Limited, I |
Cayman Islands | |
KLA-Tencor Corporation (Cayman) Limited, II |
Cayman Islands | |
KLA-Tencor Corporation (Cayman) Limited, III |
Cayman Islands | |
KLA-Tencor Corporation (Cayman) Limited, IV |
Cayman Islands | |
KLA-Tencor Semiconductor Equipment Technology (Shanghai) Co., Ltd. |
China | |
Therma-Wave (Shanghai) Co., Ltd |
China | |
KLA-Tencor France SARL |
France | |
ADE International GmbH |
Germany | |
KLA-Tencor GmbH |
Germany | |
KLA-Tencor Software India Private Limited |
India | |
KLA-Tencor Ireland Ltd. |
Ireland | |
KLA-Tencor Corporation (Israel) |
Israel | |
KLA-Tencor控股(1987)有限公司 |
Israel | |
KLA-Tencor Corporation (1992) Ltd. |
Israel | |
KLA-Tencor Integrated Metrology (Israel) (2002) Ltd. |
Israel | |
KLA-Tencor Italy S.R.L. |
Italy | |
Japan ADE, Ltd. |
Japan | |
KLA-Tencor Japan, Ltd. |
Japan | |
SensArray Japan Corporation |
Japan | |
Name |
State or Other Jurisdiction of Incorporation |
|
INTERNATIONAL SUBSIDIARIES (continued) |
||
Therma-Wave (Japan), K.K. |
Japan | |
VLSI Standards, K.K. |
Japan | |
KLA-Tencor Korea, Inc. |
Korea | |
KLA-Tencor (Malaysia) Sdn Bhd |
Malaysia | |
KLA-Tencor (Singapore) PTE, Ltd. |
Singapore | |
KLA-Tencor Singapore Holding Co. PTE. Ltd. |
Singapore | |
KLA Instruments S.A. |
Switzerland | |
KLA-Tencor Yield Management Software Taiwan Corporation |
Taiwan | |
KLA-Tencor (Thailand) Ltd. |
Thailand | |
KLA-Tencor有限 |
United Kingdom | |
KLA-Tencor (Service) Limited |
United Kingdom | |
Therma-Wave, Ltd. |
United Kingdom |