Exhibit 21.1
KLA-Tencor Corporation
List of Subsidiaries as of June 30, 2009
Name |
State or Other Jurisdiction of Incorporation |
|
DOMESTIC SUBSIDIARIES |
||
International Sales & Business, Inc. |
California | |
KLA-Tencor China Corporation |
California | |
KLA-Tencor International Corporation |
California | |
VLSI Standards, Inc. |
California | |
ADE International Corporation |
Delaware | |
Belize Holdings, LLC |
Delaware | |
ICOS Vision Systems, Inc. |
Delaware | |
KLA-Tencor Asia-Pac Distribution Corporation |
Delaware | |
KT Venture Group, L.L.C. |
Delaware | |
KT Venture Group II, L.L.C. |
Delaware | |
ADE Technologies, Inc. |
Massachusetts | |
INTERNATIONAL SUBSIDIARIES |
||
Belize Holdings BVBA |
Belgium | |
ICOS Vision Systems Corporation NV |
Belgium | |
ICOS Vision Systems NV |
Belgium | |
Lee Ta Technologies (BVI), Inc. |
British Virgin Islands | |
KLA-Tencor Corporation (Cayman) Limited, I |
Cayman Islands | |
KLA-Tencor Corporation (Cayman) Limited, II |
Cayman Islands | |
KLA-Tencor Corporation (Cayman) Limited, III |
Cayman Islands | |
KLA-Tencor Corporation (Cayman) Limited, IV |
Cayman Islands | |
ICOS Vision Systems (Shenzhen) Co. Ltd. |
China | |
KLA-Tencor国际Trading (Shanghai) Co., Ltd. |
China | |
KLA-Tencor Semiconductor Equipment Technology (Shanghai) Co., Ltd. |
China | |
Vistec Semiconductor Systems (Shanghai) Co., Ltd. |
China | |
KLA-Tencor France SARL |
France | |
ICOS Vision Systems GmbH |
Germany | |
KLA-Tencor GmbH |
Germany | |
KLA-Tencor MIE GmbH |
Germany | |
KLA-Tencor MIE Holdings GmbH & Co. KG |
Germany | |
KLA-Tencor MIE Holdings Verwaltungs GmbH |
Germany | |
KLA-Tencor MIE Jena GmbH |
Germany | |
ICOS Vision Systems Ltd. |
Hong Kong | |
KLA-Tencor MIE Limited |
Hong Kong | |
KLA-Tencor Software India Private Limited |
India | |
KLA-Tencor Ireland Ltd. |
Ireland | |
Optical Metrology Patents Limited |
Ireland | |
KLA-Tencor Corporation (Israel) Ltd. |
Israel | |
KLA-Tencor Corporation Holding (1987) Ltd. |
Israel | |
KLA-Tencor Corporation (1992) Ltd. |
Israel | |
KLA-Tencor Integrated Metrology (Israel) (2002) Ltd. |
Israel | |
KLA-Tencor Italy S.R.L. |
Italy | |
ICOS Vision Systems Ltd. |
Japan | |
KLA-Tencor Japan, Ltd. |
Japan | |
VLSI Standards, K.K. |
Japan | |
ICOS Vision Systems Korea Co. Ltd. |
Korea | |
Name |
State or Other Jurisdiction of Incorporation |
|
INTERNATIONAL SUBSIDIARIES (continued) |
||
KLA-Tencor Korea, Inc. |
Korea | |
KLA-Tencor MIE S.à r.l. |
Luxembourg | |
KLA-Tencor MIE Holdings S.à r.l. |
Luxembourg | |
KLA-Tencor (Malaysia) Sdn Bhd |
Malaysia | |
ICOS Vision Systems Pte. Ltd. |
Singapore | |
KLA-Tencor (Singapore) Pte Ltd. |
Singapore | |
KLA-Tencor Singapore Holding Co. Pte. Ltd. |
Singapore | |
KLA Instruments S.A. |
Switzerland | |
ICOS Vision Systems Taiwan Co. Ltd. |
Taiwan | |
KLA-Tencor Yield Management Software Taiwan Corporation |
Taiwan | |
KLA-Tencor (Thailand) Ltd. |
Thailand | |
KLA-Tencor有限 |
United Kingdom | |
KLA-Tencor (Service) Limited |
United Kingdom |