Name

State or Other Jurisdiction of Incorporation

DOMESTIC SUBSIDIARIES

International Sales & Business, Inc.

California

KLA-Tencor Building Corporation

California

KLA-Tencor DISC Corporation

California

KLA-Tencor International Corporation

California

KLA-Tencor Klinnik Corporation

California

KLA-Tencor Technologies Corporation

California

KLA-Tencor China Corporation

California

KLA-Tencor Asia-Pac Distribution Corporation

Delaware

VLSI Standards, Inc.

California

INTERNATIONAL SUBSIDIARIES

KLA-Tencor Corporation (Cayman) Limited, I

Cayman Islands

KLA-Tencor Corporation (Cayman) Limited, II

Cayman Islands

KLA-Tencor Corporation (Cayman) Limited, III

Cayman Islands

KLA-Tencor (Cayman) Limited IV

Cayman Islands

KLA-Tencor Corporation (Israel) Ltd.

Israel

KLA-Tencor Holding Limited

Israel

KLA-Tencor Corporation 1992 Ltd.

Israel

KLA-Tencor Integrated Metrology (Israel) (2002) Ltd.

Israel

KLA-Tencor Italy S.R.L.

Italy

KLA-Tencor Japan, Ltd.

Japan

VLSI Standards, K.K.

Japan

KLA-Tencor GmbH

Germany

KLA-Tencor France SARL

France

KLA-Tencor Korea, Inc.

Korea

KLA-Tencor有限

United Kingdom

KLA-Tencor (Services) Limited

United Kingdom

KLA-Tencor (Malaysia) Sdn Bhd

Malaysia

KLA-Tencor (Singapore) PTE, Ltd.

Singapore

KLA-Tencor国际Trading (Shanghai) Co., Ltd.

China

KLA-Tencor Microelectronics Equipment (Tianjin) Co., Ltd.

China

KLA-Tencor Semiconductor Equipment Technology (Shanghai) Co., Ltd.

China

KLA Instruments S.A.

Switzerland

Yield Analysis Software Technologies, Inc.

Taiwan

Lee Ta Technologies (BVI), Inc.

British Virgin Islands

KLA-Tencor (Thailand) Ltd.

Thailand

KLA-Tencor Software India Private Limited

India