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Tencor™ P-7

的Tencor P-7笔分析器提供阶梯高度measurement capability for steps from a few nanometers to one millimeter, for production and R&D environments. The system supports 2D and 3D measurements of step heights, roughness, bow, and stress for scans up to 150mm without stitching.

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Product Description

The Tencor P-7 stylus profiler builds on the success of the market leading Tencor P-17 benchtop stylus profiling system. It includes the superior measurement performance of the P-17 technology in a platform that offers a great price-to-features ratio for a benchtop stylus profiler. The Tencor P-7 stylus profiler supports 2D and 3D measurements of step heights, roughness, bow, and stress for scans up to 150mm without stitching.

Features

台阶高度：纳米至1000µm
Low force with constant force control: 0.03 to 50mg
Scan full diameter of the sample without stitching
Video: 5MP high-resolution color camera
Arc correction: Removes error due to arc motion of the stylus
Software: Easy-to-use software interface
Production capability: Fully automated with sequencing, pattern recognition and SECS/GEM

Applications

Step height: 2D and 3D step height
Texture: 2D and 3D roughness and waviness
表格：2D和3D弓和形状
压力：2D和3D薄膜应力
Defect review: 2D and 3D defect surface topography

Industries

Universities, research labs, and institutes
Semiconductor and compound semiconductor
LED: Light emitting diodes
Solar
MEMS: Micro-electro-mechanical systems
Data storage
汽车
Medical devices
And more: Contact us with your requirements

Step Height

The Tencor P-7 is capable of measuring 2D and 3D step heights from nanometers to 1000µm. This enables quantification of material deposited or removed during etch, sputter, SIMS, deposition, spin coating, CMP and other processes. The Tencor P-7 has constant force control that dynamically adjusts to apply the same force on the sample surface, regardless of step height. This results in good measurement stability and enables accurate measurement of soft materials, such as photoresist.

质地：粗糙和波浪状

Tencor P-7测量2D和3D纹理，量化样品的粗糙度和波动性。软件过滤器将测量值分离为粗糙度和波浪成分，并计算参数，例如均方根（RMS）粗糙度。

Form: Bow and Shape

The Tencor P-7 can measure the 2D shape or bow of a surface. This includes measurement of wafer bow that can result from mismatch between layers during device fabrication, such as deposition of multiple layers for the production of semiconductor or compound semiconductor devices. The Tencor P-7 can also quantify the height and radius of curvature of structures, such as a lens.

Stress: 2D and 3D Thin Film Stress

The Tencor P-7 is capable of measuring stress induced during the manufacture of devices with multiple process layers, such as semiconductor or compound semiconductor devices. The bow of the surface is accurately measured using a stress chuck to support the sample in a neutral position. The change in shape from a process, such as film deposition, is then used to calculate the stress by applying Stoney’s equation. 2D stress is measured with a single scan across the sample diameter for samples up to 200mm without the need to stitch. 3D stress is measured using a combination of 2D scans, with the theta stage rotating between scans to measure the full sample surface.

Defect Review

缺陷审查用于测量缺陷的地形，例如划痕的深度。缺陷检查工具识别缺陷，并将位置坐标写入KLARF文件。缺陷审查功能读取klarf文件，对齐样品，并允许用户选择2D或3D测量的缺陷。DEFECT审查用于测量缺陷的地形，例如刮擦的深度。缺陷检查工具识别缺陷，并将位置坐标写入KLARF文件。缺陷审查功能读取klarf文件，对齐样品，并允许用户为2D或3D测量选择缺陷。

The options for the Tencor™ P-7 are available to add on with your new product, or in the future.联系您的销售代表以了解更多信息。

Stylus Options

The Tencor P-7 has a variety of styli available to support the measurement of step heights, high aspect ratio steps, roughness, sample bow, and stress. The tip radius ranges from 100nm to 50µm and determines the lateral resolution of the measurement. The included angle ranges from 20 to 100 degrees, which specifies the maximum aspect ratio of the measured feature. All styli are manufactured from diamond to reduce wear and increase stylus lifetime.

样品卡盘

Tencor P-7有一系列可用于支持应用程序要求的Chuck。该标准是一种通用真空卡盘，具有精确定位50至150mm的样品的销钉。通用Chuck用三点定位器支持弓箭和应力测量，以在中性位置支撑样品。提供太阳能样品和200mm通用Chuck的其他选项。

Isolation Tables

The Tencor P-7 has both tabletop and free-standing isolation table options. The Granite Isolator™ Series offers tabletop systems that combine granite with high grade silicone gel to provide passive isolation. The Onyz Series tabletop isolation systems use pneumatic air isolators to provide passive isolation. The TMC 63-500 Series isolation table is a free-standing steel frame table that uses pneumatic air isolators to provide passive isolation.

Step Height Standards

The Tencor P-7 uses thin and thick film NIST-traceable step height standards offered by VLSI Standards. The standards feature an oxide step on a silicon die mounted on a quartz block, or an etched quartz step with a chrome coating. A step height range of 8nm to 250µm is available.

Apex Analysis Software

Apex analysis software enhances the standard data analysis capability of the Tencor P-7 with an extended suite of leveling, filtering, step height, roughness, and surface topography analysis techniques. Apex supports ISO roughness calculation methods, plus local standards, such as ASME. Apex can also serve as a report writing platform with the capability to add text, annotations, and pass/fail criteria. Apex is offered in eight languages.

Offline Analysis Software

The Tencor P-7 offline software has the same data analysis and recipe creation capability that exists on the tool. This enables the user to create recipes and analyze data without using valuable tool time.

Pattern Recognition

Pattern recognition uses pre-taught patterns to automatically align the sample. This enables fully automated measurements for enhanced measurement stability by reducing the impact of operator error. Pattern recognition combined with advanced calibrations reduces stage positioning error and enables seamless transfer of recipes between systems.

SECS/GEM and HSMS

SECS/GEM and HSMS communications support factory automation systems and enable remote control of the Tencor P-7. Measurements results are automatically reported to host SPC systems, plus alarms and key calibration/configuration data. The Tencor P-7 is compliant with SEMI standards E4, E5, E30, and E37.

Apex Software

Stylus profilers from KLA Instruments are available with advanced 2D/3D surface analysis software to provide additional insight into profilometer measurement data. The Apex software includes data processing, analysis, visualization and reporting capabilities for both 2D profiles and 3D topography.

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Thin Film Stress Measurements using KLA Stylus-Based Profilers

For Tencor^™和P系列的手写笔剖面图，可以在膜沉积之前和之后进行全直径的轮廓测量，以计算诱导的薄膜应力。还包括硬件和软件使用建议。

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2 d表面测量参数

When using the Tencor^™P-7, P-17 and P-170, and HRP^®-260 surface profilometers, the user sets up scan recipes which include calculations of various 2D surface metrology measurement parameters, including surface roughness. This application note provides mathematical detail regarding the equations used to generate the parameter values.

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3D Surface Measurement Parameters

When using the Tencor^™P-7, P-17 and P-170, and HRP^®-260 surface profilometers, the user sets up scan recipes which include calculations of various 3D surface metrology measurement parameters, including surface roughness. This application note provides mathematical detail regarding the equations used to generate the parameter values.

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Stylus Product Line

KLA Instruments^™stylus profilometers may be used with different styli to optimize measurements for specific applications. The KLA profilers, including the Alpha-Step^®D-Series, Tencor^™P系列和高分辨率分析器（HRP^®系列)都使用相同的笔的设计。这个:ication note discusses the various types of styli available for these stylus profilometers and typical applications for their use.

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Profiler Pattern Recognition Selection

KLA Instruments^™Tencor^™p系列笔recogn轮廓曲线仪提供模式ition capability for automated surface analysis. This application note describes pattern recognition and its usage for automated sample alignment for the Tencor P-7, P-17, P-170, and HRP-260 profilometers.

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Precision Depth Measurement of Shallow SIMS Craters using a KLA Instruments^™Stylus剖面研究仪

The depth of SIMS craters generated by ion beam milling is used to determine the concentration of impurities. The objective of this application note is to present a technique to accurately measure the depth of shallow SIMS craters using a stylus profiler.

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Topography Sensor Technology for Stylus Profilers

The topography sensor is one component of the stylus measurement head, which is used to track the surface of the sample being measured. Three major sensor types are LVDT, Optical Lever and LVDC, and this application note discusses the design of each.

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Tencor™ P-7

Tencor™ P-7

Product Description

Features

Applications

Industries

Step Height

质地：粗糙和波浪状

Form: Bow and Shape

Stress: 2D and 3D Thin Film Stress

Defect Review

Stylus Options

样品卡盘

Isolation Tables

Step Height Standards

Apex Analysis Software

Offline Analysis Software

Pattern Recognition