Goodwill and Purchased Intangible Assets - Schedule of Goodwill (Details) - 3 months ended Sep. 30, 2015 $ in Thousands |
reporting_unit |
USD ($) |
segment |
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---|---|---|---|---|---|---|---|---|---|---|
Goodwill [Line Items] | ||||||||||
Number of reporting units | 4 | 4 | ||||||||
Goodwill [Roll Forward] | ||||||||||
Balance as of June 30, 2015 | $ 335,263 | |||||||||
Goodwill allocation | 0 | |||||||||
Goodwill adjustment | (45) | |||||||||
Balance as of September 30, 2015 | 335,218 | |||||||||
Wafer Inspection | ||||||||||
Goodwill [Roll Forward] | ||||||||||
Balance as of June 30, 2015 | [1] | 332,783 | ||||||||
Goodwill allocation | [2] | (51,671) | ||||||||
Goodwill adjustment | (45) | |||||||||
Balance as of September 30, 2015 | 281,067 | |||||||||
Patterning | ||||||||||
Goodwill [Roll Forward] | ||||||||||
Balance as of June 30, 2015 | [3] | 2,480 | ||||||||
Goodwill allocation | [2] | 50,775 | ||||||||
Goodwill adjustment | 0 | |||||||||
Balance as of September 30, 2015 | 53,255 | |||||||||
Other Segments | ||||||||||
Goodwill [Roll Forward] | ||||||||||
Balance as of June 30, 2015 | 0 | |||||||||
Goodwill allocation | [2] | 896 | ||||||||
Goodwill adjustment | 0 | |||||||||
Balance as of September 30, 2015 | $ 896 | |||||||||
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