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Segment Reporting and Geographic Information - Revenue from External Customers by Products and Services (Details) - USD ($) $ in Thousands |
3 Months Ended | ||||
|---|---|---|---|---|---|
|
Sep. 30, 2015 |
Sep. 30, 2014 |
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| Revenue from External Customer [Line Items] | |||||
| Revenues | $ 642,644 | $ 642,901 | |||
| 段的百分比total revenues | 100.00% | 100.00% | |||
| Wafer Inspection | |||||
| Revenue from External Customer [Line Items] | |||||
| Revenues | $ 227,783 | $ 294,482 | |||
| 段的百分比total revenues | 35.00% | 46.00% | |||
| Patterning | |||||
| Revenue from External Customer [Line Items] | |||||
| Revenues | $ 198,085 | $ 152,898 | |||
| 段的百分比total revenues | 31.00% | 24.00% | |||
| Global Service and Support(1) | |||||
| Revenue from External Customer [Line Items] | |||||
| Revenues | [1] | $ 199,871 | $ 171,958 | ||
| 段的百分比total revenues | [1] | 31.00% | 27.00% | ||
| Other | |||||
| Revenue from External Customer [Line Items] | |||||
| Revenues | $ 16,905 | $ 23,563 | |||
| 段的百分比total revenues | 3.00% | 3.00% | |||
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