Quarterly report pursuant to Section 13 or 15(d)

EQUITY, LONG-TERM INCENTIVE COMPENSATION PLANS AND NON-CONTROLLING INTEREST - Non-controlling Interest (Details)

v3.21.2
EQUITY, LONG-TERM INCENTIVE COMPENSATION PLANS AND NON-CONTROLLING INTEREST - Non-controlling Interest (Details)
Sep. 30, 2021
Orbograph
Noncontrolling Interest [Line Items]
Non-controlling interest, ownership 94.00%
OLTS
Noncontrolling Interest [Line Items]
Non-controlling interest, ownership 97.00%
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