Quarterly report pursuant to Section 13 or 15(d)

BUSINESS COMBINATIONS (Details)

v3.20.4
BUSINESS COMBINATIONS (Details) - USD ($)
3 Months Ended
4月24日,2020
Aug. 22, 2019
Dec. 31, 2020
Business Acquisition
Estimated additional consideration $ 0
April 2020 acquisition
Business Acquisition
Total purchase consideration $ 11,400,000
Acquired goodwill $ 2,200,000
August 2019 acquisition
Business Acquisition
Total purchase consideration $ 94,000,000.0
Additional consideration (up to) $ 60,000,000.0
August 2019 acquisition | Wafer Inspection and Patterning
Business Acquisition
Acquired goodwill 54,200,000
Other Acquisitions
Business Acquisition
Contingent consideration liability, non-current $ 7,200,000
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